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[Analysis Case] Evaluation of Metal and Organic Contamination on Wafer Surface

[Analysis Case] Evaluation of Metal and Organic Contamination on Wafer Surface

Comprehensive evaluation based on the analysis results of multiple methods.

Foreign substances attached to manufacturing equipment or parts can affect product defects and equipment operation issues. By properly analyzing and evaluating these foreign substances, we can investigate the causes of their occurrence and improve the defects. This document presents a case study of the complex analysis of contamination attached to the surface of Si wafers using ICP-MS and SWA-GC/MS. SWA (Silicon Wafer Analyzer) -GC/MS is a method that heats the wafer in an electric furnace to gasify organic substances, which are then measured using GC/MS.

  • Contract Analysis

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[Analysis Case 4] Soil Contamination Countermeasures Act Second Type Specific Hazardous Substances Leaching 10 Items

[Analysis Case 4] Soil Contamination Countermeasures Act Second Type Specific Hazardous Substances Leaching 10 Items

[Industry: Service Industry] Introduction of cases for the second category of specific hazardous substances under the Soil Contamination Countermeasures Act, with 10 leaching items.

Next Environmental Consultant Co., Ltd. offers soil analysis, inspection, testing, and measurement services nationwide in Japan. We would like to introduce a case analyzed on February 28, 2019. We received a request from a service industry client in Tokyo for a project involving the "10 leachable substances of the second category of specified harmful substances under the Soil Contamination Countermeasures Act." In January and February, we received many requests for analysis of samples other than soil. The environmental standards for soil can be used as one indicator for confirming the safety of the products themselves and investigating harmful substances in waste considering recycling. [Case Study] ■ Date: 2019/2/28 ■ Industry: Service Industry ■ Shipping Location: Tokyo ■ Type of Analysis Sample: Raw Material of Product ■ Analysis Items: 10 leachable substances of the second category of specified harmful substances under the Soil Contamination Countermeasures Act *For more details, please refer to the PDF document or feel free to contact us.

  • Contract measurement
  • Contract Analysis
  • Contract Inspection

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[Soil Notification] Changes in Items Due to Legal Revisions

[Soil Notification] Changes in Items Due to Legal Revisions

Due to the amendment of the law, some harmful substance items in the soil environmental standards and the Soil Contamination Countermeasures Act have changed.

The announcement regarding the partial revision of the environmental standards related to soil contamination, published on September 28, 2018, has been in effect since April 1, 2019. Among the soil environmental standards and soil contamination countermeasure law items, "cis-1,2-dichloroethylene" has been renamed to "1,2-dichloroethylene." Previously, only the concentration of the "cis" form was reported, but going forward, the sum of the concentrations of the "cis" and "trans" forms will be treated as the result for "1,2-dichloroethylene." Cis-1,2-dichloroethylene → 1,2-dichloroethylene (sum of cis-1,2-dichloroethylene and trans-1,2-dichloroethylene) The standard value remains unchanged at "0.04 mg/L." In response to the legal revision, our company has also revised analysis procedures and reporting items. If you have any questions, please feel free to consult us at any time.

  • Soil testing

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